chamber Cleaning products Consulting

cleaning

Consulting

1

st Pass Qualification

Specialized PM consulting

ETCH LAM

Hard Residue on L/L

Hard Residue on TM
Fiber on Robot Handler

Replace the Parts

- Damaged

- Defected

- Scratch

Particle issue on Strip Chamber
Hard Residue

Cleaning Application on SLD Area

ETCH Rate Delay
Particle issue
VM High issue
Uniformity issue
Regularly PM Application

Parts Recovery

CVD Ultima

Ceramic Dome Recovery
Uniformity issue
Falling Particle Issue
Center Align

Replace the Parts

- Damaged

- Defected

- Scratch

Cleaning Application on Slit Valve

Rust on EFEM
Fiber, Particle

Particle Issue
Micro Arcing
Uniformity issue
Scorch Mark
Regularly PM Application

Hard Residue on Lift ASS’Y

Parts Recovery

Consulting Models

ETCH MI CVD CMP / WET

MASK

AMAT

TETRA

PHOTO

TEL

TRACK

ASML

NXE 3400C

ETCH

AMAT

SYM3
E-MAX
OPUS
CENTURA
DPS2 MESA
Producer ETCH

LAM Research

Flex
Kiyo
Versys Metal

TEL

Vigus
RLSA

HITACHI

SEBIT

PSK

SUPRA
TERA 21

SEMES

MICHELAN C3
MICHELAN O3

APTC

Leo

CVD

AMAT

ULTIMA (200mm/300mm)
PRODUCER
PRECISION
P5000

LAM Research

VECTOR
SPEED (200mm/300mm)
SABRE EXCEL
SEQUEL (200mm)

WONIK IPS

PRESTO
GEMINI
MAHA

TES

CHALLENGER

ASM

XP8 QCM

METAL

AMAT

ENDURA - Process, Degas, RPC

TEL

TriasE+
TriasE+ EX

LAM Research

INOVA
ALTUS RPC

JUSUNG Engineering

CYCLONE

ASM

EMERALD 3000

Eugenus

QXP 8300

WONIK IPS

BLUETAIN

ULVAC

ENTRON

IMP

AMAT

VIISta

Mattson

Helios XP

DIFF

EUGENE

BJM1000

AMAT

SINGEN

TEL

FURNACE

SEMES

PROFESSIONAL300

CLEAN

AMAT

Producer Clean

PSK

INTEGER XP